Purity that makes the difference.

Designed to meet the highest standards: flexible components for semiconductor manufacturing, produced under controlled conditions to ensure maximum process reliability.

Contact

One partner, one mission: from development to delivery in cleanroom quality

In semiconductor production, absolute cleanliness is paramount. Even the tiniest particles or residues can jeopardise the quality of entire batches. That is why we rely on highly specialised cleaning processes, ranging from wet cleaning and in-line vacuum drying to final packaging under cleanroom conditions. Every assembly is inspected under ISO-7 conditions and undergoes comprehensive testing, such as helium leak tests or particle analyses. The result: precision-manufactured, ultra-clean and reliable outcomes.

Pure Connections for Precise Processes.

Ultra-flexible for the most demanding applications.

Maximum flexibility with minimal rigidity and a compact design. Our diaphragm bellows reliably separate clean and functional areas. This protects your processes from contamination and ensures consistent cleanroom quality.

Every component is precisely tailored to your application.

Extended service life of sensitive assemblies

Minimised risks of leaks or contamination

Easy integration into existing cleanroom systems

Pressure-resistant and precise.

For ultra-clean gas and liquid conveyance. Our corrugated bellows combine flexibility with high pressure resistance. Designed for ultra-pure media, they meet purity requirements ranging from UHV leak-tightness to particle-free packaging. Custom-designed for lines carrying gases, liquids or vacuum.

Reduced downtime thanks to stable pressure resistance

Verified leak-tightness through helium leak testing and particle testing

ISO 7 cleanroom-compliant packaging for contamination-free installation

Corrugated hoses (high-purity corrugated hoses)

Flexible and robust.

Absolute cleanliness for gases, liquids and vacuum applications.

Whether metal or hybrid, with or without braiding: our corrugated hoses convey media

reliably, even over tight bends and long distances. Custom-configured, they fit perfectly into

your system. The result is flexible connections with the highest level of purity.

- Simplified routing in complex plant layouts

- Greater operational reliability thanks to flexible design

- Reduced installation times thanks to customisation

For microelectronic and semiconductor production

Non-fatigue metal bellows for vacuum valves
diaphragm bellows with the highest flexibility
Flexible metal hoses for applications requiring extreme cleanliness
Precision bellows/actuators for optical applications

High-grade production infrastructure

Diverse automated and manual plants for watery component cleaning
Vacuum drying to meet the highest standards for component residual moisture
Autonomous production environment with clean rooms up to class 5 acc. to ISO 14644

Quality from the global market leader

To ensure the quality of our components, we offer all standard component tests even under clean room conditions:

Leak test by means of helium leak test
Visual surface inspection by means of UV light
Analysis of metallic and organic particles
Qualification of gas emission behaviour

An individual, clean room-compatible package allows our products to be brought onto the market directly.

Next Steps

Downloads

Product Overview HYDRA® Flexible Vacuum Components

Alle Downloads